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The dual role of silver during silicon etching in HF solution.

Abouda-Lachiheb M, Nafie N, Bouaicha M - Nanoscale Res Lett (2012)

Bottom Line: In this paper, we give experimental results arguing the dual role that silver has during the formation of silicon nanostructures.Through our investigations, we tracked the silver particles that indicated which mechanism is involved.Characterizations of the prepared samples were made using a scanning electron microscope.

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Affiliation: Laboratoire de Photovoltaique, Centre de Recherches et des Technologies de l'Energie, Technopole de Borj-Cedria, BP 95, Hammam-Lif, Tunis, 2050, Tunisia. Mongi.Bouaicha@crten.rnrt.tn.

ABSTRACT
It was reported that during silicon etching, silver was subjected to have a controversial role. Some researchers debate that silver protects silicon, and, at the same time, other ones confirm that silver catalyzes silicon underneath. In this paper, we give experimental results arguing the dual role that silver has during the formation of silicon nanostructures. We give a proof that the role of silver depends on the experimental details and the intrinsic properties of silver during its deposition on the silicon wafer. Through our investigations, we tracked the silver particles that indicated which mechanism is involved. Characterizations of the prepared samples were made using a scanning electron microscope.

No MeSH data available.


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SEM images of sample B. (a) Tilted cross section and (b) a magnification showing the silver particles.
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Figure 2: SEM images of sample B. (a) Tilted cross section and (b) a magnification showing the silver particles.

Mentions: However, in the case of sample B, where a 30-nm silver film was deposited before the etching step, we observe pores formation at a depth of 200 μm as shown in Figure 2. Figure 2a is a tilted SEM image of the sample showing both the top surface and the cross section. We notice the beginning of pores from the top of the wafer and the presence of silver nanoparticles in the bottom of pores which is magnified in image (Figure 2b). The formed pores are not uniform. Hence, we observe the pores at different depths. The average of the pore diameters is around several micrometers. This could be due to the thickness of the silver film.


The dual role of silver during silicon etching in HF solution.

Abouda-Lachiheb M, Nafie N, Bouaicha M - Nanoscale Res Lett (2012)

SEM images of sample B. (a) Tilted cross section and (b) a magnification showing the silver particles.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3472321&req=5

Figure 2: SEM images of sample B. (a) Tilted cross section and (b) a magnification showing the silver particles.
Mentions: However, in the case of sample B, where a 30-nm silver film was deposited before the etching step, we observe pores formation at a depth of 200 μm as shown in Figure 2. Figure 2a is a tilted SEM image of the sample showing both the top surface and the cross section. We notice the beginning of pores from the top of the wafer and the presence of silver nanoparticles in the bottom of pores which is magnified in image (Figure 2b). The formed pores are not uniform. Hence, we observe the pores at different depths. The average of the pore diameters is around several micrometers. This could be due to the thickness of the silver film.

Bottom Line: In this paper, we give experimental results arguing the dual role that silver has during the formation of silicon nanostructures.Through our investigations, we tracked the silver particles that indicated which mechanism is involved.Characterizations of the prepared samples were made using a scanning electron microscope.

View Article: PubMed Central - HTML - PubMed

Affiliation: Laboratoire de Photovoltaique, Centre de Recherches et des Technologies de l'Energie, Technopole de Borj-Cedria, BP 95, Hammam-Lif, Tunis, 2050, Tunisia. Mongi.Bouaicha@crten.rnrt.tn.

ABSTRACT
It was reported that during silicon etching, silver was subjected to have a controversial role. Some researchers debate that silver protects silicon, and, at the same time, other ones confirm that silver catalyzes silicon underneath. In this paper, we give experimental results arguing the dual role that silver has during the formation of silicon nanostructures. We give a proof that the role of silver depends on the experimental details and the intrinsic properties of silver during its deposition on the silicon wafer. Through our investigations, we tracked the silver particles that indicated which mechanism is involved. Characterizations of the prepared samples were made using a scanning electron microscope.

No MeSH data available.


Related in: MedlinePlus