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Design and fabrication of single-walled carbon nanonet flexible strain sensors.

Huang YT, Huang SC, Hsu CC, Chao RM, Vu TK - Sensors (Basel) (2012)

Bottom Line: All of the micro-fabrication was compatible with the standard IC process.Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges.The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung 80778, Taiwan. yating3133@yahoo.com.tw

ABSTRACT
This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

No MeSH data available.


Related in: MedlinePlus

Fabrication process.
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f2-sensors-12-03269: Fabrication process.

Mentions: The manufacturing process for the presented strain sensing device is summarized in Figure 2. First, a 500 nm oxide layer is grown on a silicon wafer (Figure 2(a)). The surface of the SiO2 layer is not naturally hydrophilic. In order to make the surface hydrophilic for uniform coating with nanosize metal catalysts, the surface of the oxide substrate is first treated with standard cleaning solutions 1 and 2 (SC1 and SC2) then, subsequently dipped in a Co/Mo solution. After dipping, the wafer was placed into the alcohol catalytic chemical vapor deposition (ACCVD) apparatus for growing CNNs (Figure 2(b)). Next, Reactive Ion Etching was used to etch CNNs to form the serpentine pattern (Figure 2(c)). The wafer with the SWCNN pattern was subsequently placed into the Parylene deposition equipment (Specialty Coating System, Model PDS-2010) for a 6 μm thick Parylene-C coating. A thermal release tape (green layer) was used to bond the Parylene-C layer with the CNN serpentine pattern (Figure 2(d,e)).


Design and fabrication of single-walled carbon nanonet flexible strain sensors.

Huang YT, Huang SC, Hsu CC, Chao RM, Vu TK - Sensors (Basel) (2012)

Fabrication process.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3376622&req=5

f2-sensors-12-03269: Fabrication process.
Mentions: The manufacturing process for the presented strain sensing device is summarized in Figure 2. First, a 500 nm oxide layer is grown on a silicon wafer (Figure 2(a)). The surface of the SiO2 layer is not naturally hydrophilic. In order to make the surface hydrophilic for uniform coating with nanosize metal catalysts, the surface of the oxide substrate is first treated with standard cleaning solutions 1 and 2 (SC1 and SC2) then, subsequently dipped in a Co/Mo solution. After dipping, the wafer was placed into the alcohol catalytic chemical vapor deposition (ACCVD) apparatus for growing CNNs (Figure 2(b)). Next, Reactive Ion Etching was used to etch CNNs to form the serpentine pattern (Figure 2(c)). The wafer with the SWCNN pattern was subsequently placed into the Parylene deposition equipment (Specialty Coating System, Model PDS-2010) for a 6 μm thick Parylene-C coating. A thermal release tape (green layer) was used to bond the Parylene-C layer with the CNN serpentine pattern (Figure 2(d,e)).

Bottom Line: All of the micro-fabrication was compatible with the standard IC process.Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges.The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung 80778, Taiwan. yating3133@yahoo.com.tw

ABSTRACT
This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

No MeSH data available.


Related in: MedlinePlus