Limits...
Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus

(a) Sensitivity versus g and tox, when W = 220 nm and H = 220 nm; (b) Sensitivity versus tox for different values of g; (c) Sensitivity versus g and tair, when W = 220 nm and H = 220 nm; (d) Sensitivity versus tair for different values of g.
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f9-sensors-12-02436: (a) Sensitivity versus g and tox, when W = 220 nm and H = 220 nm; (b) Sensitivity versus tox for different values of g; (c) Sensitivity versus g and tair, when W = 220 nm and H = 220 nm; (d) Sensitivity versus tair for different values of g.

Mentions: Regarding the additional oxide layer, we have found a linear dependence between sensitivity and tox, as in Figure 9(a,b). Our simulations show that the wider the gap, the smaller the absolute value of Ψtox, in agreement with considerations for Γc. In Figure 9(c,d) the influence of air bubbles is shown.


Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

(a) Sensitivity versus g and tox, when W = 220 nm and H = 220 nm; (b) Sensitivity versus tox for different values of g; (c) Sensitivity versus g and tair, when W = 220 nm and H = 220 nm; (d) Sensitivity versus tair for different values of g.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3376618&req=5

f9-sensors-12-02436: (a) Sensitivity versus g and tox, when W = 220 nm and H = 220 nm; (b) Sensitivity versus tox for different values of g; (c) Sensitivity versus g and tair, when W = 220 nm and H = 220 nm; (d) Sensitivity versus tair for different values of g.
Mentions: Regarding the additional oxide layer, we have found a linear dependence between sensitivity and tox, as in Figure 9(a,b). Our simulations show that the wider the gap, the smaller the absolute value of Ψtox, in agreement with considerations for Γc. In Figure 9(c,d) the influence of air bubbles is shown.

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus