Limits...
Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus

(a) Calculated Sensitivity versus g and ϑ, with W = 220 nm and H = 220 nm; (b) Sensitivity versus ϑ for different values of g.
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f6-sensors-12-02436: (a) Calculated Sensitivity versus g and ϑ, with W = 220 nm and H = 220 nm; (b) Sensitivity versus ϑ for different values of g.

Mentions: Referring to slot waveguides, assuming a silicon wire width of 220 nm and a reference gap dimension of 120 nm, a very low sensitivity dependence with respect to g has been found, which guarantees high tolerance to any possible, technologically induced, variations of the gap size. It is interesting to note that this result is obtained for silicon wires having squared cross sections (220 × 220 nm2). As in case of confinement factor, fabrication tolerances have been calculated for the sensitivity with respect to several technological parameters. The optimizing parameter is g, while the silicon wires width is W = 220 nm. Firstly, the influence of sidewall angles on sensitivity has been investigated for different slot widths. Figure 6(a,b) shows that, with increasing the gap dimension, a peak in the sensitivity curve can be found for a specific value of ϑ.


Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

(a) Calculated Sensitivity versus g and ϑ, with W = 220 nm and H = 220 nm; (b) Sensitivity versus ϑ for different values of g.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3376618&req=5

f6-sensors-12-02436: (a) Calculated Sensitivity versus g and ϑ, with W = 220 nm and H = 220 nm; (b) Sensitivity versus ϑ for different values of g.
Mentions: Referring to slot waveguides, assuming a silicon wire width of 220 nm and a reference gap dimension of 120 nm, a very low sensitivity dependence with respect to g has been found, which guarantees high tolerance to any possible, technologically induced, variations of the gap size. It is interesting to note that this result is obtained for silicon wires having squared cross sections (220 × 220 nm2). As in case of confinement factor, fabrication tolerances have been calculated for the sensitivity with respect to several technological parameters. The optimizing parameter is g, while the silicon wires width is W = 220 nm. Firstly, the influence of sidewall angles on sensitivity has been investigated for different slot widths. Figure 6(a,b) shows that, with increasing the gap dimension, a peak in the sensitivity curve can be found for a specific value of ϑ.

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus