Limits...
Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus

(a) Sensitivity versus W and g with H = 220 nm; (b) Sensitivity versus W for different values of gap region width; (c) Wire waveguide cross section; (d) Sensitivity of TE-like and TM-like modes versus Ww for a silicon wire waveguide with Hw = 220 nm.
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f5-sensors-12-02436: (a) Sensitivity versus W and g with H = 220 nm; (b) Sensitivity versus W for different values of gap region width; (c) Wire waveguide cross section; (d) Sensitivity of TE-like and TM-like modes versus Ww for a silicon wire waveguide with Hw = 220 nm.

Mentions: In this paragraph, we focus our analysis on design criteria for homogeneous sensing optimization. Then, the sensitivity achieved by the slot waveguide, for the same range of values of W and g of Figure 2(a), has been calculated and the results have been reported in Figure 5(a,b). It is important to note that increasing values of the gap dimension tend to significantly reduce the waveguide sensitivity.


Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

(a) Sensitivity versus W and g with H = 220 nm; (b) Sensitivity versus W for different values of gap region width; (c) Wire waveguide cross section; (d) Sensitivity of TE-like and TM-like modes versus Ww for a silicon wire waveguide with Hw = 220 nm.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3376618&req=5

f5-sensors-12-02436: (a) Sensitivity versus W and g with H = 220 nm; (b) Sensitivity versus W for different values of gap region width; (c) Wire waveguide cross section; (d) Sensitivity of TE-like and TM-like modes versus Ww for a silicon wire waveguide with Hw = 220 nm.
Mentions: In this paragraph, we focus our analysis on design criteria for homogeneous sensing optimization. Then, the sensitivity achieved by the slot waveguide, for the same range of values of W and g of Figure 2(a), has been calculated and the results have been reported in Figure 5(a,b). It is important to note that increasing values of the gap dimension tend to significantly reduce the waveguide sensitivity.

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus