Limits...
Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus

(a) Γc (%) versus W and g with H = 220 nm; (b) Γc (%) versus t2 and t1 with H = 220 nm, W = 210 nm and g = 120 nm.
© Copyright Policy
Related In: Results  -  Collection

License
getmorefigures.php?uid=PMC3376618&req=5

f2-sensors-12-02436: (a) Γc (%) versus W and g with H = 220 nm; (b) Γc (%) versus t2 and t1 with H = 220 nm, W = 210 nm and g = 120 nm.

Mentions: The gap region has been varied in the range between 80 and 220 nm and the silicon wires width between 190 and 230 nm. The analysis shows that an optimum region for Γc exists, with values up to 50%, as shown in Figure 2(a). The reason of this behavior can be easily understood considering that, for larger values of W, the optical field is better confined into both silicon wires, so the values of the field at the boundary with the slot region is reduced and the power confinement decreases. On the other hand, if the silicon wires width becomes too small, the optical field will penetrate more into the substrate, so the cladding confinement factor will again decrease, simultaneously increasing the oxide confinement factor.


Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

(a) Γc (%) versus W and g with H = 220 nm; (b) Γc (%) versus t2 and t1 with H = 220 nm, W = 210 nm and g = 120 nm.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3376618&req=5

f2-sensors-12-02436: (a) Γc (%) versus W and g with H = 220 nm; (b) Γc (%) versus t2 and t1 with H = 220 nm, W = 210 nm and g = 120 nm.
Mentions: The gap region has been varied in the range between 80 and 220 nm and the silicon wires width between 190 and 230 nm. The analysis shows that an optimum region for Γc exists, with values up to 50%, as shown in Figure 2(a). The reason of this behavior can be easily understood considering that, for larger values of W, the optical field is better confined into both silicon wires, so the values of the field at the boundary with the slot region is reduced and the power confinement decreases. On the other hand, if the silicon wires width becomes too small, the optical field will penetrate more into the substrate, so the cladding confinement factor will again decrease, simultaneously increasing the oxide confinement factor.

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus