Limits...
Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus

Strip-slot coupler geometry. In the insets, Ex field distributions at the starting and ending section of the coupler are shown (calculated by FEM).
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f12-sensors-12-02436: Strip-slot coupler geometry. In the insets, Ex field distributions at the starting and ending section of the coupler are shown (calculated by FEM).

Mentions: Taking advantage from considerations made till now in terms of fabrication tolerances and sensitivity optimization, we have focused our work on low aspect ratio slot waveguides, optimized as in Section 3.2, with W = 220 nm, H = 220 nm and g = 120 nm. The slot coupler geometry is sketched in Figure 12. The device consists of three parts: the first part is a single mode silicon wire waveguide, having width W1 = 510 nm and height H = 220 nm (the same as the slot waveguide silicon wires for best technology compatibility). The length L0 of this input waveguide in not a critical parameter, so it would depend only by the specific application (in our simulations L0 = 1 μm). The function of this input waveguide is only to drive the light at the second part of the coupler starting section. This second part consists of a L1 long, tapered Y-branch waveguide.


Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

Strip-slot coupler geometry. In the insets, Ex field distributions at the starting and ending section of the coupler are shown (calculated by FEM).
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3376618&req=5

f12-sensors-12-02436: Strip-slot coupler geometry. In the insets, Ex field distributions at the starting and ending section of the coupler are shown (calculated by FEM).
Mentions: Taking advantage from considerations made till now in terms of fabrication tolerances and sensitivity optimization, we have focused our work on low aspect ratio slot waveguides, optimized as in Section 3.2, with W = 220 nm, H = 220 nm and g = 120 nm. The slot coupler geometry is sketched in Figure 12. The device consists of three parts: the first part is a single mode silicon wire waveguide, having width W1 = 510 nm and height H = 220 nm (the same as the slot waveguide silicon wires for best technology compatibility). The length L0 of this input waveguide in not a critical parameter, so it would depend only by the specific application (in our simulations L0 = 1 μm). The function of this input waveguide is only to drive the light at the second part of the coupler starting section. This second part consists of a L1 long, tapered Y-branch waveguide.

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus