Limits...
Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus

Schematic view of slot waveguide cross section. H and W are photonic wires height and width, respectively, g is the gap width, t1 and t2 are silicon etching residues outside and inside the gap region, respectively, and ϑ is the slanted sidewall angle.
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f1-sensors-12-02436: Schematic view of slot waveguide cross section. H and W are photonic wires height and width, respectively, g is the gap width, t1 and t2 are silicon etching residues outside and inside the gap region, respectively, and ϑ is the slanted sidewall angle.

Mentions: A slot waveguide is a well known optical waveguide, formed by two high refractive index photonic wires very close to each other, surrounded by a low refractive index medium. Our analysis is based on Silicon-On-Insulator (SOI) technology, so we assume buried oxide substrate (ns = 1.444), silicon photonic wires (nw = 3.476) and an aqueous solution as cladding (nc = 1.330). The operative wavelength is λ = 1.55 μm. The entire structure is sketched in Figure 1.


Optimizing SOI slot waveguide fabrication tolerances and strip-slot coupling for very efficient optical sensing.

Passaro VM, La Notte M - Sensors (Basel) (2012)

Schematic view of slot waveguide cross section. H and W are photonic wires height and width, respectively, g is the gap width, t1 and t2 are silicon etching residues outside and inside the gap region, respectively, and ϑ is the slanted sidewall angle.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3376618&req=5

f1-sensors-12-02436: Schematic view of slot waveguide cross section. H and W are photonic wires height and width, respectively, g is the gap width, t1 and t2 are silicon etching residues outside and inside the gap region, respectively, and ϑ is the slanted sidewall angle.
Mentions: A slot waveguide is a well known optical waveguide, formed by two high refractive index photonic wires very close to each other, surrounded by a low refractive index medium. Our analysis is based on Silicon-On-Insulator (SOI) technology, so we assume buried oxide substrate (ns = 1.444), silicon photonic wires (nw = 3.476) and an aqueous solution as cladding (nc = 1.330). The operative wavelength is λ = 1.55 μm. The entire structure is sketched in Figure 1.

Bottom Line: In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

View Article: PubMed Central - PubMed

Affiliation: Dipartimento di Elettrotecnica ed Elettronica, Politecnico di Bari, Bari, Italy. passaro@deemail.poliba.it

ABSTRACT
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.

No MeSH data available.


Related in: MedlinePlus