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Measurements of true leak rates of MEMS packages.

Han B - Sensors (Basel) (2012)

Bottom Line: Gas transport mechanisms that characterize the hermetic behavior of MEMS packages are fundamentally different depending upon which sealing materials are used in the packages.In metallic seals, gas transport occurs through a few nanoscale leak channels (gas conduction) that are produced randomly during the solder reflow process, while gas transport in polymeric seals occurs through the bulk material (gas diffusion).In this review article, the techniques to measure true leak rates of MEMS packages with the two sealing materials are described and discussed: a Helium mass spectrometer based technique for metallic sealing and a gas diffusion based model for polymeric sealing.

View Article: PubMed Central - PubMed

Affiliation: CALCE Electronic Products and Systems Center, Department of Mechanical Engineering, University of Maryland, College Park, MD 20742, USA. bthan@umd.edu

ABSTRACT
Gas transport mechanisms that characterize the hermetic behavior of MEMS packages are fundamentally different depending upon which sealing materials are used in the packages. In metallic seals, gas transport occurs through a few nanoscale leak channels (gas conduction) that are produced randomly during the solder reflow process, while gas transport in polymeric seals occurs through the bulk material (gas diffusion). In this review article, the techniques to measure true leak rates of MEMS packages with the two sealing materials are described and discussed: a Helium mass spectrometer based technique for metallic sealing and a gas diffusion based model for polymeric sealing.

No MeSH data available.


Related in: MedlinePlus

(a) Apparent leak rates of Package 1 obtained from the helium mass spectrometer the zero signal time and the apparent leak rate at the beginning of the measurement phase (Ω) are illustrated; and (b) the data of the measurement phase are repotted with the results from the regression analysis.
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f5-sensors-12-03082: (a) Apparent leak rates of Package 1 obtained from the helium mass spectrometer the zero signal time and the apparent leak rate at the beginning of the measurement phase (Ω) are illustrated; and (b) the data of the measurement phase are repotted with the results from the regression analysis.

Mentions: The apparent leak rate signal was measured using a commercial helium fine leak tester (Model DGC 1001, Alcatel). The data was recorded at 5 Hz and the results of Package 1 are shown in Figure 5(a), where the zero signal time and the apparent leak rate at the beginning of the measurement phase (Ω) are also illustrated.


Measurements of true leak rates of MEMS packages.

Han B - Sensors (Basel) (2012)

(a) Apparent leak rates of Package 1 obtained from the helium mass spectrometer the zero signal time and the apparent leak rate at the beginning of the measurement phase (Ω) are illustrated; and (b) the data of the measurement phase are repotted with the results from the regression analysis.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3376579&req=5

f5-sensors-12-03082: (a) Apparent leak rates of Package 1 obtained from the helium mass spectrometer the zero signal time and the apparent leak rate at the beginning of the measurement phase (Ω) are illustrated; and (b) the data of the measurement phase are repotted with the results from the regression analysis.
Mentions: The apparent leak rate signal was measured using a commercial helium fine leak tester (Model DGC 1001, Alcatel). The data was recorded at 5 Hz and the results of Package 1 are shown in Figure 5(a), where the zero signal time and the apparent leak rate at the beginning of the measurement phase (Ω) are also illustrated.

Bottom Line: Gas transport mechanisms that characterize the hermetic behavior of MEMS packages are fundamentally different depending upon which sealing materials are used in the packages.In metallic seals, gas transport occurs through a few nanoscale leak channels (gas conduction) that are produced randomly during the solder reflow process, while gas transport in polymeric seals occurs through the bulk material (gas diffusion).In this review article, the techniques to measure true leak rates of MEMS packages with the two sealing materials are described and discussed: a Helium mass spectrometer based technique for metallic sealing and a gas diffusion based model for polymeric sealing.

View Article: PubMed Central - PubMed

Affiliation: CALCE Electronic Products and Systems Center, Department of Mechanical Engineering, University of Maryland, College Park, MD 20742, USA. bthan@umd.edu

ABSTRACT
Gas transport mechanisms that characterize the hermetic behavior of MEMS packages are fundamentally different depending upon which sealing materials are used in the packages. In metallic seals, gas transport occurs through a few nanoscale leak channels (gas conduction) that are produced randomly during the solder reflow process, while gas transport in polymeric seals occurs through the bulk material (gas diffusion). In this review article, the techniques to measure true leak rates of MEMS packages with the two sealing materials are described and discussed: a Helium mass spectrometer based technique for metallic sealing and a gas diffusion based model for polymeric sealing.

No MeSH data available.


Related in: MedlinePlus