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Fabrication and characterization of high Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector.

Ling T, Chen SL, Guo LJ - Opt Express (2011)

Bottom Line: Quality factors as high as 10(5) have been measured at telecommunication wavelength range.A noise equivalent pressure (NEP) is around 88 Pa over a bandwidth range of 1-75 MHz.We have improved the NEP by a factor of 3 compared to our previous best result.

View Article: PubMed Central - PubMed

Affiliation: Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109, USA.

ABSTRACT
Smooth sidewall silicon micro-ring molds have been fabricated using resist reflow and thermal oxidation method. High Q factor polymer micro-ring resonators have been fabricated using these molds. Quality factors as high as 10(5) have been measured at telecommunication wavelength range. By carefully examining the different loss mechanisms in polymer micro-ring, we find that the surface scattering loss can be as low as 0.23 dB/cm, much smaller than the absorption loss of the polystyrene polymer used in our devices. When used as an ultrasound detector such a high Q polymer micro-ring device can achieve an acoustic sensitivity around 36.3 mV/kPa with 240 μW operating power. A noise equivalent pressure (NEP) is around 88 Pa over a bandwidth range of 1-75 MHz. We have improved the NEP by a factor of 3 compared to our previous best result.

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(a) Transmission spectrum of polymer micro-ring immerged in DI water. (b) Single shot of acoustic waveform measured by high Q polymer micro-ring.
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g005: (a) Transmission spectrum of polymer micro-ring immerged in DI water. (b) Single shot of acoustic waveform measured by high Q polymer micro-ring.

Mentions: A 20 MHz unfocused transducer (V316, Panametrics NDT, Waltham, MA) was used to characterize the ultrasonic sensitivity of the high Q polymer micro-ring. During the experiment, the micro-ring device was immerged in de-ionized (DI) water which was used as a coupling medium for the acoustic wave. The device’s transmission spectrum (Fig. 5(a)Fig. 5


Fabrication and characterization of high Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector.

Ling T, Chen SL, Guo LJ - Opt Express (2011)

(a) Transmission spectrum of polymer micro-ring immerged in DI water. (b) Single shot of acoustic waveform measured by high Q polymer micro-ring.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3368304&req=5

g005: (a) Transmission spectrum of polymer micro-ring immerged in DI water. (b) Single shot of acoustic waveform measured by high Q polymer micro-ring.
Mentions: A 20 MHz unfocused transducer (V316, Panametrics NDT, Waltham, MA) was used to characterize the ultrasonic sensitivity of the high Q polymer micro-ring. During the experiment, the micro-ring device was immerged in de-ionized (DI) water which was used as a coupling medium for the acoustic wave. The device’s transmission spectrum (Fig. 5(a)Fig. 5

Bottom Line: Quality factors as high as 10(5) have been measured at telecommunication wavelength range.A noise equivalent pressure (NEP) is around 88 Pa over a bandwidth range of 1-75 MHz.We have improved the NEP by a factor of 3 compared to our previous best result.

View Article: PubMed Central - PubMed

Affiliation: Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109, USA.

ABSTRACT
Smooth sidewall silicon micro-ring molds have been fabricated using resist reflow and thermal oxidation method. High Q factor polymer micro-ring resonators have been fabricated using these molds. Quality factors as high as 10(5) have been measured at telecommunication wavelength range. By carefully examining the different loss mechanisms in polymer micro-ring, we find that the surface scattering loss can be as low as 0.23 dB/cm, much smaller than the absorption loss of the polystyrene polymer used in our devices. When used as an ultrasound detector such a high Q polymer micro-ring device can achieve an acoustic sensitivity around 36.3 mV/kPa with 240 μW operating power. A noise equivalent pressure (NEP) is around 88 Pa over a bandwidth range of 1-75 MHz. We have improved the NEP by a factor of 3 compared to our previous best result.

Show MeSH
Related in: MedlinePlus