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Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film.

Shin JH, Lee SH, Byeon KJ, Han KS, Lee H, Tsunozaki K - Nanoscale Res Lett (2011)

Bottom Line: Therefore, the development of low-cost, transparent, and flexible templates is essential.In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold.Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process.

View Article: PubMed Central - HTML - PubMed

Affiliation: Department of Materials Science and Engineering, Korea University, Anam-dong 5-ga, Seongbuk-gu, Seoul 136-713, South Korea. heonlee@korea.ac.kr.

ABSTRACT
UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography.

No MeSH data available.


Related in: MedlinePlus

SEM micrographs. (a, b, c) micro- and nano-sized patterns on master Si mold, (d, e, f) replicated micro- and nano-sized patterns on fluorinated polymer-coated flexible PET film by hot embossing lithography.
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Figure 6: SEM micrographs. (a, b, c) micro- and nano-sized patterns on master Si mold, (d, e, f) replicated micro- and nano-sized patterns on fluorinated polymer-coated flexible PET film by hot embossing lithography.

Mentions: Figure 6 shows the scanning electron microscopy (SEM) micrographs of the micro- and nano-sized patterns on the master Si mold and replicated patterns on the fluorinated polymer-coated flexible PET film by hot embossing lithography. An S-4300 SEM system from Hitachi was used. As shown in Figure 6, the micro- and nano-sized patterns on the master Si mold were replicated onto the fluorinated polymer-coated flexible PET film by hot embossing lithography with high fidelity and without any defects. Due to the slightly tapered profile of the patterns of the Si master mold and elastic nature of the hot embossing process of the fluorinated polymer, the hot-embossed patterns on the PET films were slightly smaller than the patterns of the Si master mold.


Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film.

Shin JH, Lee SH, Byeon KJ, Han KS, Lee H, Tsunozaki K - Nanoscale Res Lett (2011)

SEM micrographs. (a, b, c) micro- and nano-sized patterns on master Si mold, (d, e, f) replicated micro- and nano-sized patterns on fluorinated polymer-coated flexible PET film by hot embossing lithography.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3211878&req=5

Figure 6: SEM micrographs. (a, b, c) micro- and nano-sized patterns on master Si mold, (d, e, f) replicated micro- and nano-sized patterns on fluorinated polymer-coated flexible PET film by hot embossing lithography.
Mentions: Figure 6 shows the scanning electron microscopy (SEM) micrographs of the micro- and nano-sized patterns on the master Si mold and replicated patterns on the fluorinated polymer-coated flexible PET film by hot embossing lithography. An S-4300 SEM system from Hitachi was used. As shown in Figure 6, the micro- and nano-sized patterns on the master Si mold were replicated onto the fluorinated polymer-coated flexible PET film by hot embossing lithography with high fidelity and without any defects. Due to the slightly tapered profile of the patterns of the Si master mold and elastic nature of the hot embossing process of the fluorinated polymer, the hot-embossed patterns on the PET films were slightly smaller than the patterns of the Si master mold.

Bottom Line: Therefore, the development of low-cost, transparent, and flexible templates is essential.In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold.Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process.

View Article: PubMed Central - HTML - PubMed

Affiliation: Department of Materials Science and Engineering, Korea University, Anam-dong 5-ga, Seongbuk-gu, Seoul 136-713, South Korea. heonlee@korea.ac.kr.

ABSTRACT
UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography.

No MeSH data available.


Related in: MedlinePlus