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Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film.

Shin JH, Lee SH, Byeon KJ, Han KS, Lee H, Tsunozaki K - Nanoscale Res Lett (2011)

Bottom Line: Therefore, the development of low-cost, transparent, and flexible templates is essential.In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold.Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process.

View Article: PubMed Central - HTML - PubMed

Affiliation: Department of Materials Science and Engineering, Korea University, Anam-dong 5-ga, Seongbuk-gu, Seoul 136-713, South Korea. heonlee@korea.ac.kr.

ABSTRACT
UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography.

No MeSH data available.


Related in: MedlinePlus

Schematic drawing. Schematic drawing of (a) hot embossing lithography system and (b) UV nanoimprint lithography system.
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Figure 1: Schematic drawing. Schematic drawing of (a) hot embossing lithography system and (b) UV nanoimprint lithography system.

Mentions: Figure 1 shows experimental schematics and detailed process flow of hot embossing lithography system and UV nanoimprint lithography system made by NND (Seoul) in Korea. Both systems used to fabricate nano-sized patterns are of the vessel type.


Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film.

Shin JH, Lee SH, Byeon KJ, Han KS, Lee H, Tsunozaki K - Nanoscale Res Lett (2011)

Schematic drawing. Schematic drawing of (a) hot embossing lithography system and (b) UV nanoimprint lithography system.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3211878&req=5

Figure 1: Schematic drawing. Schematic drawing of (a) hot embossing lithography system and (b) UV nanoimprint lithography system.
Mentions: Figure 1 shows experimental schematics and detailed process flow of hot embossing lithography system and UV nanoimprint lithography system made by NND (Seoul) in Korea. Both systems used to fabricate nano-sized patterns are of the vessel type.

Bottom Line: Therefore, the development of low-cost, transparent, and flexible templates is essential.In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold.Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process.

View Article: PubMed Central - HTML - PubMed

Affiliation: Department of Materials Science and Engineering, Korea University, Anam-dong 5-ga, Seongbuk-gu, Seoul 136-713, South Korea. heonlee@korea.ac.kr.

ABSTRACT
UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography.

No MeSH data available.


Related in: MedlinePlus