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Fabrication of ultrahigh-density nanowires by electrochemical nanolithography.

Chen F, Jiang H, Kiefer AM, Clausen AM, Ting YH, Wendt AE, Ding B, Lagally MG - Nanoscale Res Lett (2011)

Bottom Line: An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition.The closely packed AgNPs have a density of up to 1.4 × 1011 cm-2 with good size uniformity.AgNPs retain their shape and position on the substrate when used as nanomasks for producing ultrahigh-density vertical nanowire arrays with controllable size, making it a one-step nanolithography technique.

View Article: PubMed Central - HTML - PubMed

Affiliation: University of Wisconsin-Madison, Madison, WI 53706, USA. lagally@engr.wisc.edu.

ABSTRACT
An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition. The closely packed AgNPs have a density of up to 1.4 × 1011 cm-2 with good size uniformity. AgNPs retain their shape and position on the substrate when used as nanomasks for producing ultrahigh-density vertical nanowire arrays with controllable size, making it a one-step nanolithography technique. We demonstrate this method on Si/SiGe multilayer superlattices using electrochemical nanopatterning and plasma etching to obtain high-density Si/SiGe multilayer superlattice nanowires.

No MeSH data available.


Related in: MedlinePlus

Scanning electron microscopy images and size distribution histograms. Scanning electron microscopy images and size distribution histograms of immersion time and pulse length dependent size distribution of AgNPs. From (a-e) the pulse length τ = 0.5 s with different immersion times: (a) t = 10 s, (b) t = 20 s, (c) t = 30 s, (d) t = 40 s, and (e) t = 50 s. (f) Pulse length τ = 1 ms and t = 50 s. Insets are histograms of the particle diameter. The scale bars in all Figures are 200 nm.
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Figure 2: Scanning electron microscopy images and size distribution histograms. Scanning electron microscopy images and size distribution histograms of immersion time and pulse length dependent size distribution of AgNPs. From (a-e) the pulse length τ = 0.5 s with different immersion times: (a) t = 10 s, (b) t = 20 s, (c) t = 30 s, (d) t = 40 s, and (e) t = 50 s. (f) Pulse length τ = 1 ms and t = 50 s. Insets are histograms of the particle diameter. The scale bars in all Figures are 200 nm.

Mentions: Figure 2 shows scanning electron microscopy (SEM, Zeiss, LEO-1530, Carl Zeiss SMT GmbH, Oberchoken, Germany) images of AgNPs after ECD under various conditions. In the experiment, we fix the pulse period T to be 1 s. The size and density of the AgNPs vary with the immersion time and pulse length. The pulse length τ is first fixed to 0.5 s in order to study the result for different immersion time t. We vary the immersion time from 10 s to 50 s in steps of 10 s. For t = 10 s, the average NP size is around 20 nm in diameter, with 14-17 nm NPs the most prevalent (Figure 2a). The size distribution remains qualitatively the same with increasing immersion time up to 40 s, but the average and most prevalent sizes increase. For t = 20 s, the average size is 25.4 nm, and the most prevalent size range is 17-20 nm (Figure 2b). Finally, nanoparticles with diameters of 29 ± 4 nm are achieved at an immersion time of 40 s, as shown in Figure 2d. When the immersion time reaches 50 s, however, the sizes become random and range from 25 to 37 nm (Figure 2e).


Fabrication of ultrahigh-density nanowires by electrochemical nanolithography.

Chen F, Jiang H, Kiefer AM, Clausen AM, Ting YH, Wendt AE, Ding B, Lagally MG - Nanoscale Res Lett (2011)

Scanning electron microscopy images and size distribution histograms. Scanning electron microscopy images and size distribution histograms of immersion time and pulse length dependent size distribution of AgNPs. From (a-e) the pulse length τ = 0.5 s with different immersion times: (a) t = 10 s, (b) t = 20 s, (c) t = 30 s, (d) t = 40 s, and (e) t = 50 s. (f) Pulse length τ = 1 ms and t = 50 s. Insets are histograms of the particle diameter. The scale bars in all Figures are 200 nm.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3211863&req=5

Figure 2: Scanning electron microscopy images and size distribution histograms. Scanning electron microscopy images and size distribution histograms of immersion time and pulse length dependent size distribution of AgNPs. From (a-e) the pulse length τ = 0.5 s with different immersion times: (a) t = 10 s, (b) t = 20 s, (c) t = 30 s, (d) t = 40 s, and (e) t = 50 s. (f) Pulse length τ = 1 ms and t = 50 s. Insets are histograms of the particle diameter. The scale bars in all Figures are 200 nm.
Mentions: Figure 2 shows scanning electron microscopy (SEM, Zeiss, LEO-1530, Carl Zeiss SMT GmbH, Oberchoken, Germany) images of AgNPs after ECD under various conditions. In the experiment, we fix the pulse period T to be 1 s. The size and density of the AgNPs vary with the immersion time and pulse length. The pulse length τ is first fixed to 0.5 s in order to study the result for different immersion time t. We vary the immersion time from 10 s to 50 s in steps of 10 s. For t = 10 s, the average NP size is around 20 nm in diameter, with 14-17 nm NPs the most prevalent (Figure 2a). The size distribution remains qualitatively the same with increasing immersion time up to 40 s, but the average and most prevalent sizes increase. For t = 20 s, the average size is 25.4 nm, and the most prevalent size range is 17-20 nm (Figure 2b). Finally, nanoparticles with diameters of 29 ± 4 nm are achieved at an immersion time of 40 s, as shown in Figure 2d. When the immersion time reaches 50 s, however, the sizes become random and range from 25 to 37 nm (Figure 2e).

Bottom Line: An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition.The closely packed AgNPs have a density of up to 1.4 × 1011 cm-2 with good size uniformity.AgNPs retain their shape and position on the substrate when used as nanomasks for producing ultrahigh-density vertical nanowire arrays with controllable size, making it a one-step nanolithography technique.

View Article: PubMed Central - HTML - PubMed

Affiliation: University of Wisconsin-Madison, Madison, WI 53706, USA. lagally@engr.wisc.edu.

ABSTRACT
An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition. The closely packed AgNPs have a density of up to 1.4 × 1011 cm-2 with good size uniformity. AgNPs retain their shape and position on the substrate when used as nanomasks for producing ultrahigh-density vertical nanowire arrays with controllable size, making it a one-step nanolithography technique. We demonstrate this method on Si/SiGe multilayer superlattices using electrochemical nanopatterning and plasma etching to obtain high-density Si/SiGe multilayer superlattice nanowires.

No MeSH data available.


Related in: MedlinePlus