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Porous anodic alumina on galvanically grown PtSi layer for application in template-assisted Si nanowire growth.

Michelakaki I, Nassiopoulou AG, Stavrinidou E, Breza K, Frangis N - Nanoscale Res Lett (2011)

Bottom Line: We report on the fabrication and morphology/structural characterization of a porous anodic alumina (PAA)/PtSi nano-template for use as matrix in template-assisted Si nanowire growth on a Si substrate.The PtSi layer was formed by electroless deposition from an aqueous solution containing the metal salt and HF, while the PAA membrane by anodizing an Al film deposited on the PtSi layer.The morphology and structure of the PtSi layer and of the alumina membrane on top were studied by Scanning and High Resolution Transmission Electron Microscopies (SEM, HRTEM).

View Article: PubMed Central - HTML - PubMed

Affiliation: Institute of Microelectronics, NCSR Demokritos, Terma Patriarchou Grigoriou, Aghia Paraskevi, 153 10, Athens, Greece. A.Nassiopoulou@imel.demokritos.gr.

ABSTRACT
We report on the fabrication and morphology/structural characterization of a porous anodic alumina (PAA)/PtSi nano-template for use as matrix in template-assisted Si nanowire growth on a Si substrate. The PtSi layer was formed by electroless deposition from an aqueous solution containing the metal salt and HF, while the PAA membrane by anodizing an Al film deposited on the PtSi layer. The morphology and structure of the PtSi layer and of the alumina membrane on top were studied by Scanning and High Resolution Transmission Electron Microscopies (SEM, HRTEM). Cross sectional HRTEM images combined with electron diffraction (ED) were used to characterize the different interfaces between Si, PtSi and porous anodic alumina.

No MeSH data available.


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Plane-view bright-field image (a), dark-field image (b), and the corresponding electron diffraction pattern (c) from sample S-15 min. Rings from Si (substrate) and PtSi structures are revealed in the diffraction pattern. The spherical nanoparticles on the surface (images (a) and (b)) are relatively small and well separated between them.
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Figure 3: Plane-view bright-field image (a), dark-field image (b), and the corresponding electron diffraction pattern (c) from sample S-15 min. Rings from Si (substrate) and PtSi structures are revealed in the diffraction pattern. The spherical nanoparticles on the surface (images (a) and (b)) are relatively small and well separated between them.

Mentions: b) The S-15 min sample surface was covered by a small number of nanocrystals of sizes ranging from 10 to 100 nm and lying on an amorphous layer. The nanocrystals were identified as PtSi nanocrystals, as shown in the corresponding diffraction pattern and dark field TEM images of Figure 3. Figure 3a shows a plane view bright field image, Figure 3b a dark field image and Figure 3c the corresponding electron diffraction pattern. Rings from Si (substrate) and PtSi structures are revealed in the diffraction pattern. The spherical nanoparticles on the surface (images (a) and (b)) are relatively small and well separated between them.


Porous anodic alumina on galvanically grown PtSi layer for application in template-assisted Si nanowire growth.

Michelakaki I, Nassiopoulou AG, Stavrinidou E, Breza K, Frangis N - Nanoscale Res Lett (2011)

Plane-view bright-field image (a), dark-field image (b), and the corresponding electron diffraction pattern (c) from sample S-15 min. Rings from Si (substrate) and PtSi structures are revealed in the diffraction pattern. The spherical nanoparticles on the surface (images (a) and (b)) are relatively small and well separated between them.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3211510&req=5

Figure 3: Plane-view bright-field image (a), dark-field image (b), and the corresponding electron diffraction pattern (c) from sample S-15 min. Rings from Si (substrate) and PtSi structures are revealed in the diffraction pattern. The spherical nanoparticles on the surface (images (a) and (b)) are relatively small and well separated between them.
Mentions: b) The S-15 min sample surface was covered by a small number of nanocrystals of sizes ranging from 10 to 100 nm and lying on an amorphous layer. The nanocrystals were identified as PtSi nanocrystals, as shown in the corresponding diffraction pattern and dark field TEM images of Figure 3. Figure 3a shows a plane view bright field image, Figure 3b a dark field image and Figure 3c the corresponding electron diffraction pattern. Rings from Si (substrate) and PtSi structures are revealed in the diffraction pattern. The spherical nanoparticles on the surface (images (a) and (b)) are relatively small and well separated between them.

Bottom Line: We report on the fabrication and morphology/structural characterization of a porous anodic alumina (PAA)/PtSi nano-template for use as matrix in template-assisted Si nanowire growth on a Si substrate.The PtSi layer was formed by electroless deposition from an aqueous solution containing the metal salt and HF, while the PAA membrane by anodizing an Al film deposited on the PtSi layer.The morphology and structure of the PtSi layer and of the alumina membrane on top were studied by Scanning and High Resolution Transmission Electron Microscopies (SEM, HRTEM).

View Article: PubMed Central - HTML - PubMed

Affiliation: Institute of Microelectronics, NCSR Demokritos, Terma Patriarchou Grigoriou, Aghia Paraskevi, 153 10, Athens, Greece. A.Nassiopoulou@imel.demokritos.gr.

ABSTRACT
We report on the fabrication and morphology/structural characterization of a porous anodic alumina (PAA)/PtSi nano-template for use as matrix in template-assisted Si nanowire growth on a Si substrate. The PtSi layer was formed by electroless deposition from an aqueous solution containing the metal salt and HF, while the PAA membrane by anodizing an Al film deposited on the PtSi layer. The morphology and structure of the PtSi layer and of the alumina membrane on top were studied by Scanning and High Resolution Transmission Electron Microscopies (SEM, HRTEM). Cross sectional HRTEM images combined with electron diffraction (ED) were used to characterize the different interfaces between Si, PtSi and porous anodic alumina.

No MeSH data available.


Related in: MedlinePlus