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Anisotropic TixSn1-xO2 nanostructures prepared by magnetron sputter deposition.

Chen S, Li Z, Zhang Z - Nanoscale Res Lett (2011)

Bottom Line: Regular arrays of TixSn1-xO2 nanoflakes were fabricated through glancing angle sputter deposition onto self-assembled close-packed arrays of 200-nm-diameter polystyrene spheres.The reflectance measurements showed that the melon seed-shaped nanoflakes exhibited optimal properties of antireflection in the entire visible and ultraviolet region.In addition, we determined their anisotropic reflectance in the direction parallel to the surface of nanoflakes and perpendicular to it, arising from the anisotropic morphology.

View Article: PubMed Central - HTML - PubMed

Affiliation: State Key Laboratory of New Ceramic and Fine Processing, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China. zcli@tsinghua.edu.cn.

ABSTRACT
Regular arrays of TixSn1-xO2 nanoflakes were fabricated through glancing angle sputter deposition onto self-assembled close-packed arrays of 200-nm-diameter polystyrene spheres. The morphology of nanostructures could be controlled by simply adjusting the sputtering power of the Ti target. The reflectance measurements showed that the melon seed-shaped nanoflakes exhibited optimal properties of antireflection in the entire visible and ultraviolet region. In addition, we determined their anisotropic reflectance in the direction parallel to the surface of nanoflakes and perpendicular to it, arising from the anisotropic morphology.

No MeSH data available.


Scanning electron microscopic images of TixSn1-xO2 films deposited at various discharge current (I) of Ti target: (a) 0.15 A; (b) 0.20 A; and (c) 0.25 A.
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Figure 3: Scanning electron microscopic images of TixSn1-xO2 films deposited at various discharge current (I) of Ti target: (a) 0.15 A; (b) 0.20 A; and (c) 0.25 A.

Mentions: For the deposition step, the power of RF sputtering was fixed, while the power of DC sputtering was regulated at the discharge currents 0.15, 0.20, and 0.25 A, respectively, for the three prepared samples named as 1#, 2#, and 3#. Their structures were identified by XRD, indicating an amorphous state in all the samples. As for the morphology, Figure 3 shows typical SEM micrographs of 1#, 2#, and 3#. Arrays of well-separated TixSn1-xO2 nanostructures were produced. The regular hexagonal arrays replicate the close-packed pattern of the polystyrene spheres, which indicates that each nanosphere leads to the formation of a nanostructure. It illustrates that substrate patterning is effective in positioning GLAD nanostructures into ordered arrays. Atomic shadowing and adatom diffusion are the dominant growth mechanisms in the process of GLAD. Oblique angle flux incidence enhances atomic shadowing which produces areas that vapor flux cannot directly reach while adatom mobility is too low for surface diffusion to fill the voids [12]. Nanosphere templates are favorable to further enhance the atomic shadowing as nucleation sites for nanostructures. The substrate is shadowed during deposition, first by the array of nanospheres and then by the growing nanostructures. By causing the vapor flux to arrive at an extreme glancing angle (which is 85° in our work) and applying periodic polystyrene sphere arrays as templates, atomic shadowing is greatly enhanced and regular close-packed arrays of nanostructures can be engineered.


Anisotropic TixSn1-xO2 nanostructures prepared by magnetron sputter deposition.

Chen S, Li Z, Zhang Z - Nanoscale Res Lett (2011)

Scanning electron microscopic images of TixSn1-xO2 films deposited at various discharge current (I) of Ti target: (a) 0.15 A; (b) 0.20 A; and (c) 0.25 A.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3211414&req=5

Figure 3: Scanning electron microscopic images of TixSn1-xO2 films deposited at various discharge current (I) of Ti target: (a) 0.15 A; (b) 0.20 A; and (c) 0.25 A.
Mentions: For the deposition step, the power of RF sputtering was fixed, while the power of DC sputtering was regulated at the discharge currents 0.15, 0.20, and 0.25 A, respectively, for the three prepared samples named as 1#, 2#, and 3#. Their structures were identified by XRD, indicating an amorphous state in all the samples. As for the morphology, Figure 3 shows typical SEM micrographs of 1#, 2#, and 3#. Arrays of well-separated TixSn1-xO2 nanostructures were produced. The regular hexagonal arrays replicate the close-packed pattern of the polystyrene spheres, which indicates that each nanosphere leads to the formation of a nanostructure. It illustrates that substrate patterning is effective in positioning GLAD nanostructures into ordered arrays. Atomic shadowing and adatom diffusion are the dominant growth mechanisms in the process of GLAD. Oblique angle flux incidence enhances atomic shadowing which produces areas that vapor flux cannot directly reach while adatom mobility is too low for surface diffusion to fill the voids [12]. Nanosphere templates are favorable to further enhance the atomic shadowing as nucleation sites for nanostructures. The substrate is shadowed during deposition, first by the array of nanospheres and then by the growing nanostructures. By causing the vapor flux to arrive at an extreme glancing angle (which is 85° in our work) and applying periodic polystyrene sphere arrays as templates, atomic shadowing is greatly enhanced and regular close-packed arrays of nanostructures can be engineered.

Bottom Line: Regular arrays of TixSn1-xO2 nanoflakes were fabricated through glancing angle sputter deposition onto self-assembled close-packed arrays of 200-nm-diameter polystyrene spheres.The reflectance measurements showed that the melon seed-shaped nanoflakes exhibited optimal properties of antireflection in the entire visible and ultraviolet region.In addition, we determined their anisotropic reflectance in the direction parallel to the surface of nanoflakes and perpendicular to it, arising from the anisotropic morphology.

View Article: PubMed Central - HTML - PubMed

Affiliation: State Key Laboratory of New Ceramic and Fine Processing, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China. zcli@tsinghua.edu.cn.

ABSTRACT
Regular arrays of TixSn1-xO2 nanoflakes were fabricated through glancing angle sputter deposition onto self-assembled close-packed arrays of 200-nm-diameter polystyrene spheres. The morphology of nanostructures could be controlled by simply adjusting the sputtering power of the Ti target. The reflectance measurements showed that the melon seed-shaped nanoflakes exhibited optimal properties of antireflection in the entire visible and ultraviolet region. In addition, we determined their anisotropic reflectance in the direction parallel to the surface of nanoflakes and perpendicular to it, arising from the anisotropic morphology.

No MeSH data available.