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Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes.

Harazim SM, Feng P, Sanchez S, Deneke C, Mei Y, Schmidt OG - Nanoscale Res Lett (2011)

Bottom Line: Self-organized wrinkling of pre-strained nanomembranes into nanochannels is used to fabricate a fully integrated nanofluidic device for the development of ion field effect transistors (IFETs).Constrained by the structure and shape of the membrane, the deterministic wrinkling process leads to a versatile variation of channel types such as straight two-way channels, three-way branched channels, or even four-way intersection channels.The fabrication of straight channels is well controllable and offers the opportunity to integrate multiple IFET devices into a single chip.

View Article: PubMed Central - HTML - PubMed

Affiliation: Institute for Integrative Nanosciences, IFW Dresden, Helmholtzstrasse 20, 01069 Dresden, Germany. s.harazim@ifw-dresden.de.

ABSTRACT
Self-organized wrinkling of pre-strained nanomembranes into nanochannels is used to fabricate a fully integrated nanofluidic device for the development of ion field effect transistors (IFETs). Constrained by the structure and shape of the membrane, the deterministic wrinkling process leads to a versatile variation of channel types such as straight two-way channels, three-way branched channels, or even four-way intersection channels. The fabrication of straight channels is well controllable and offers the opportunity to integrate multiple IFET devices into a single chip. Thus, several IFETs are fabricated on a single chip using a III-V semiconductor substrate to control the ion separation and to measure the ion current of a diluted potassium chloride electrolyte solution.

No MeSH data available.


Related in: MedlinePlus

Schematic of the microfluidic setup. (a) A processed transistor structure, including the electrodes and the wrinkled nanochannel. (b) SU-8 microchannel walls defining the microfluidic channels on the chip structure. (c) Sealing of the microchannel system by using a flexible PDMS top layer.
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Figure 3: Schematic of the microfluidic setup. (a) A processed transistor structure, including the electrodes and the wrinkled nanochannel. (b) SU-8 microchannel walls defining the microfluidic channels on the chip structure. (c) Sealing of the microchannel system by using a flexible PDMS top layer.

Mentions: The microchannels were defined by photolithography of SU-8 10 photoresist, which is mechanically stable and biocompatible [22-24]. By using this high viscous, negative photoresist and optimized spin-coating parameters, the microfluidic channels reach a height of 10 μm. To seal the entire channel system, a PDMS layer was prepared and placed on top of the microchannel system (see Figure 3). This top layer avoids rapid liquid evaporation and contains also connectors to attach an external micropump system to the device [25,26].


Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes.

Harazim SM, Feng P, Sanchez S, Deneke C, Mei Y, Schmidt OG - Nanoscale Res Lett (2011)

Schematic of the microfluidic setup. (a) A processed transistor structure, including the electrodes and the wrinkled nanochannel. (b) SU-8 microchannel walls defining the microfluidic channels on the chip structure. (c) Sealing of the microchannel system by using a flexible PDMS top layer.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3211272&req=5

Figure 3: Schematic of the microfluidic setup. (a) A processed transistor structure, including the electrodes and the wrinkled nanochannel. (b) SU-8 microchannel walls defining the microfluidic channels on the chip structure. (c) Sealing of the microchannel system by using a flexible PDMS top layer.
Mentions: The microchannels were defined by photolithography of SU-8 10 photoresist, which is mechanically stable and biocompatible [22-24]. By using this high viscous, negative photoresist and optimized spin-coating parameters, the microfluidic channels reach a height of 10 μm. To seal the entire channel system, a PDMS layer was prepared and placed on top of the microchannel system (see Figure 3). This top layer avoids rapid liquid evaporation and contains also connectors to attach an external micropump system to the device [25,26].

Bottom Line: Self-organized wrinkling of pre-strained nanomembranes into nanochannels is used to fabricate a fully integrated nanofluidic device for the development of ion field effect transistors (IFETs).Constrained by the structure and shape of the membrane, the deterministic wrinkling process leads to a versatile variation of channel types such as straight two-way channels, three-way branched channels, or even four-way intersection channels.The fabrication of straight channels is well controllable and offers the opportunity to integrate multiple IFET devices into a single chip.

View Article: PubMed Central - HTML - PubMed

Affiliation: Institute for Integrative Nanosciences, IFW Dresden, Helmholtzstrasse 20, 01069 Dresden, Germany. s.harazim@ifw-dresden.de.

ABSTRACT
Self-organized wrinkling of pre-strained nanomembranes into nanochannels is used to fabricate a fully integrated nanofluidic device for the development of ion field effect transistors (IFETs). Constrained by the structure and shape of the membrane, the deterministic wrinkling process leads to a versatile variation of channel types such as straight two-way channels, three-way branched channels, or even four-way intersection channels. The fabrication of straight channels is well controllable and offers the opportunity to integrate multiple IFET devices into a single chip. Thus, several IFETs are fabricated on a single chip using a III-V semiconductor substrate to control the ion separation and to measure the ion current of a diluted potassium chloride electrolyte solution.

No MeSH data available.


Related in: MedlinePlus